Overview
Hyphenated-Systems develops and manufactures advanced hybrid microscopy solutions for research and industrial applications in macro/micro, micro and micro/nano technologies. Important markets for Hyphenated Systems’ products include research, development and production of microfluidic devices and micro-electro-mechanical systems (MEMS), which require accurate physical characterization and metrology with deep-submicron precision. Hyphenated Systems has pioneered the concept of “hyphenation”—the combination of diverse analytical techniques in a single integrated platform—to provide tailored solutions to unique analytical problems. Hyphenation is a major trend in current development efforts throughout the microscopy and analytical instrumentation community.
Hyphenated Systems’ products combine conventional light microscopy with the company’s patented Advanced Confocal Microscopy™ (ACM). The tools are built with an open architecture so that additional techniques can be added, such as atomic force microscopy (AFM), spectroscopy, or interferometry. By combining these technologies to meet specific imaging, measurement and analysis requirements, Hyphenated Systems provides its customers with the advanced hybrid tools they need to drive innovation in macro, micro- and nanotechnology.
As a leading innovator in the burgeoning fields of micro- and nanotechnology, Hyphenated Systems is helping to set the standards for macro-, micro- and nano-scale inspection, metrology, and manufacturing qualification systems.
Company Origin
Established in 2003, Hyphenated Systems is a spin-off start-up of Technical Instrument—a leading provider of microscopy tools for inspection and metrology for over 50 years. As a pioneer in white light and laser confocal imaging technologies, the company’s founders revolutionized microscopic imaging for both the semiconductor market in the 1970s and biomedical market in the 1990s. By partnering with academia and industry, Hyphenated Systems has maintained a leading position in imaging and metrology throughout its history, and is committed to becoming a premier instrumentation provider to the multi-disciplined nanotechnology industry.
Industry Background
Thousands of manufacturers and researchers worldwide, in the semiconductor, MEMS, advanced packaging, data storage and photonics industries inspect, measure and study their products with off line or automatic inspection systems. Billions of dollars per year are invested in purchasing such systems, and almost all are compromised by a major drawback—the Z-axis information is either not accurate enough, too complicated to extract, or too slow to acquire.
Optics, electronics and other high technology components continue to get smaller and require a higher level of accuracy related to quality manufacturing. The width of semiconductor conducting lines is measured in nanometers, as are the electromagnetic surfaces of hard disk drives, optical components’ surface quality, and their relative alignment during the assembly process. The same is true for MEMS devices, bio-MEMS and compound semiconductors. As a consequence, manufacturers are demanding more accurate inspection technologies, specifically in the Z-axis. Some inspection technologies are highly developed and widely deployed, but many inspection needs are still performed manually, statistically, two-dimensionally, or not in real-time.
The inspection and metrology of the Z-axis with resolution and accuracy in the range of nanometers is required in the following industries:
- 1. Semiconductors and Compound Semiconductors
- 2. MEMS
- 3. Bio MEMS
- 4. Microfluidics
- 5. Nanotechnology
- 6. Hard Disk
- 7. Flat Panel Display
- 8. Probe Card and Probe Mark
- 9. Electronics and Advanced Packaging
- 10. Photomask
- 11. Photonics
Market Opportunity
Hyphenated Systems’ current primary markets fall within the broad category of macro, micro- and nanotechnology with specific emphasis on MEMS and microfluidics. The key technical qualifier is a requirement for physical characterization with accuracy and precision in the micrometer to nanometer range. MEMS technologies have seen explosive growth in recent years and include such devices as the accelerometer used in automotive airbag systems. Microfluidics technologies have also expanded rapidly—the most prolific device is the inkjet printer head. Important metrology applications also exist in semiconductor industry where much of the final manufacturing and packaging processes require control at the micrometer scale.
The worldwide MEMS market reached $48 billion in 2005, and is expected to rise to $72 billion by 2008, and $95 billion by 2010, for a compound annual growth rate (CAGR) of about 15% over the five-year period, according to an August 28, 2006 report released by SEMI and Yole Developpement. Microfluidic MEMS was the largest segment of the MEMS market in 2005, with a market share of over 27%, reflecting large sales of microfluidic MEMS inkjet heads. Optical MEMS accounted for 22% of the MEMS market in 2005, with other types MEMS sensors having a 33% share. The greatest market potential lies in microfluidic systems for medical, biological and pharmaceutical applications, which are currently in the pre-production stages of development.
Leading Edge Technology
Hyphenated Systems’ 3Dmap™ (microfluidics analysis platform) and NanoScale Optical Profilers (HS OP systems) provide fast and non-invasive inspection and measurement of three-dimensional (3D) geometry of ICs, MEMS, microfluidic and similar micro- and nano-engineered or precision-machined structures.Applications include measurement of surface roughness, thin film stress, and step-heights in semiconductor manufacturing. Inspection of probes and probe marks is another application in manufacturing that is driving demand for the NanoScale OP.Advanced Imaging and Metrology Capability
Hyphenated Systems’ Advanced Confocal Microscopy (ACM) technology enables 3D surface imaging with unprecedented resolution and range. All systems are designed for fast, accurate, non-invasive inspection and measurement on any micro or nano-engineered structure. They are uniquely suited for obtaining high aspect ratio x, y, z data on steeply sloped, highly curved, or rough surfaces, and for subsurface measurements below a covering glass layer or within transparent materials—all applications that are difficult to address with competitive technologies.
Flexible Technology Platforms
Both 3Dmap and HS OP systems use a familiar white light microscope platform, allowing ready access to the powerful world of 3D measurement with minimal training. The 3Dmap system has inverted optics for improved access in microfluidic applications. The NanoScale profiler product line includes systems designed for long working distance or large depth of focus optics, scanning probe technologies, and automation. From manual bench top units to fully automated production floor systems, Hyphenated Systems provides fast, accurate flexible metrology solutions.
3Z Software Suite
ACM, combined with the Z-mension™ software suite (3Z™), enables 3D surface imaging with unprecedented Z-resolution and range. All systems are designed for fast, accurate, non-invasive inspection and measurement on any micro or nano-engineered structure. They are uniquely suited for obtaining high aspect ratio Z-data on steeply sloped, highly curved, or rough surfaces, and for subsurface measurements below a covering glass layer or within transparent materials—all applications that are difficult to address with competitive technologies.
Developed in close collaboration with leading research and engineering groups, the 3Z Analysis Software Suite is the imaging and analysis engine that powers all of Hyphenated Systems’ tools. 3Z™ allows rapid data acquisition and data sharing, and provides application, task, and control automation from an intuitive graphical user interface. All of the company’s products are scaleable and programmable to provide optimized Z-metrology across a wide range of applications.
Company Contacts
