NanoScale Optical Profilers allow researchers and engineers to tackle virtually any inspection or metrology task. NanoScale HS OP systems deliver high ratio x y z data and high resolution imaging capabilities enabling 3D measurements and visualization for the sub-100 nanometer world.
Microfluidics
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Microfluidic Channels As an emerging technology, microfluidics is at the forefront of many corporate and university research programs. Our systems give researchers the rapid, accurate, and detailed information necessary to evaluate the geometry of microchannels and related structures. This information is critical to understanding the behavior of fluids in the channels. |
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Microfluidic Flow Analysis A key aspect in the development of microfluidic devices is the characterization of fluid flow within the channels. This information is critical to managing the chemistry, mixing, thermodynamic and other behavior of systems destined for commercial production. Through collaboration with leading microfluidic researchers, our technology has been adapted specifically to accomodate the various analytical needs of microfluidic flow analysis. |
Microelectronics and Materials
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Probe Marks A critical step in semiconductor manufacturing is the testing of device function at the wafer level. Our technology provides manufacturers the precize Z information required to analyze and control the depth, volume, debris fields, and other critical probe mark characteristics to minimize yeild loss as a result of testing. |
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| Probe Cards As die sizes shring, bond pads and their spacing continues to decrease. This is causing a transition away from traditional probe cards, to more sophisticated and expensive MEMS type probe cards. The cost of these devices is pushing manufacturers to analyse their probe cards in an attempt to prolong their useful lifespans. Our technology gives manufacturers the ability to do rapid, precise analysis on the disposition of individual probe tips. |
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| Microelectromechanical Systems (MEMS) MEMS develpment is a fast growing industry, with more and more commercially viable products hitting the market every year. The development of these products requires fast, accurate, 3D imaging and metrology. Our family of optical profilers provides the accurate, 3D measurements and images needed to promote the development of a variety of MEMS basaed structures. |
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Failure Analysis/General Purpose Systems As a general purpose, failure analysis or analytical platform, the HS OP series optical profilers offer many benefits. In addition to outstanding 3D imaging and metrology capabilities the HS OP series hyphenates this capability with standard high quality Nikon brightfield and darkfield imaging techniques. |
