HS200A
The Hyphenated Systems HS200A optical profiler is an ideal choice for manufacturing and production environments. These systems combine the latest in advanced confocal technology, automation, and nanometer scale height measurements. The HS200A has been designed to quickly and automatically give manufacturing personnel the accurate, reliable data needed to effectively control critical process parameters.
The Hyphenated Systems HS200A optical profiler combines our Advanced Confocal Microscopy technology with the automation required for high throughput industrial environments. The 200mm platform is extremeley versatile and suitable for numerous industrial applications
Utilizing the same data acquisition techniques as our interactive models, the OP series, our automated systems now offer the capability to move, acquire and measure automatically. These systems can also be integrated with wafer handling robotics to provide a fully automated wafer handling and inspection systems.
Our intuitive, script based recipe system allows for storage of coordinate lists, acquisition parameters, and measurement tools. The addition of our pattern recognition feature ensures repeatable tool placement on each measurement, virtually eliminating operator induced measurement variations. Finally, acquired data and measurements may be stored in a variety of options to suit individual applications
The NanoScale 200A is designed for fast and non-invasive inspection and measurement of the 3-dimensional geometry of probe marks, probe cards, MEMS, micro lenses and similar micro- and nano-engineered or precision-machined structures. Offering Advanced Confocal Microscopy, brightfield and darkfield imaging on a single platform, the 200A is an exceptionally versatile and powerful analytical platform. In addition to routine measurements, these systems are especially wellsuited to measurements of high curvature, steep slope, rough surfaces and for measurements beneath glass windows or engineered semi-transparent films.
Z-Mension Analysis Software Developed in close collaboration with research and engineering groups, NanoScale Analysis Software (3Z™) allows rapid data reduction and data sharing with common engineering packages. The NanoScale Analysis Software offers total system flexibility. The systems are scalable and can be easily upgraded for larger sample sizes and automated inspection and metrology protocols from a user-friendly graphical interface.
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