Hyphenated Systems Unveils New Automated Nanoscale Optical Profiler
Provides the fastest, most repeatable 3D imaging on the widest range of semiconductor structures and materials
Burlingame, CA, November 28, 2006-Hyphenated Systems, a world-wide provider of hybrid microscopy solutions for three-dimensional imaging and metrology in micro and nanotechnology, announced today the release of its new HS200A NanoScale™ Optical Profiler. The HS200A adds extensive automation capability to the Hyphenated Systems workhorse?the HS200OP?for the fastest, most repeatable non-destructive analyses in critical metrology, inspection, failure analysis and quality control applications.
The system incorporates Hyphenated Systems’ patented Advanced Confocal Microscopy™ (ACM) technology that acquires and displays high-resolution (<50nm) three-dimensional images in seconds. The HS200 systems also provide the user with all the capabilities and flexibility of a fully functional, research-grade binocular optical microscope. The system is ideal for 3D imaging and metrology of rough or sloped surfaces of MEMS and other semiconductor devices, or imaging subsurfaces through transparent materials.
The system incorporates Hyphenated Systems’ patented Advanced Confocal Microscopy™ (ACM) technology that acquires and displays high-resolution (<50nm) three-dimensional images in seconds. The HS200 systems also provide the user with all the capabilities and flexibility of a fully functional, research-grade binocular optical microscope. The system is ideal for 3D imaging and metrology of rough or sloped surfaces of MEMS and other semiconductor devices, or imaging subsurfaces through transparent materials.
The NanoScale Optical Profiler acquires a series of images that slice through the sample at varying heights, then combines these images into a three-dimensional model of the sample. Its unique ability to collect data simultaneously through multiple confocal apertures greatly accelerates the data acquisition process, allowing it to construct and display 3D images in seconds.
Now the automation capabilities of the HS200A add more speed to routine tasks and improve the repeatability of measurements by removing the variability associated with the operator. The HS200A can move the sample to predefined locations, find features of interest and acquire measurements?all without operator intervention, and without the variability introduced by operator judgment, differences between operators, or operator fatigue.
About Hyphenated-Systems
Hyphenated-Systems is a world-wide provider of hybrid microscopy solutions for three-dimensional imaging and metrology down to the nanometer level (in the Z axis). Based on combinations of optical (conventional and advanced confocal) and other microscopy technologies, the company’s solutions leverage over 50 years of experience from its parent company, Technical Instrument. Hyphenated-Systems is headquartered in Burlingame, CA. For more information, please visit www.hyphenated-systems.com