Microelectromechanical Systems (MEMS)
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Application Overview: MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. MEMS is an enabling technology allowing the development of smart products, which can effectively interact with both the environment and microelectronic chips. Currently MEMS fabrication technology is used in an increasing number of commercial products such as inkjet printer heads, accelerometers for automotive airbag systems, display devices, medical devices and more. With worldwide revenues approaching 10 billion USD in 2008, this market is clearly enjoying steady growth. |
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3 Dimensional Products Need 3D Measurements As these devices become both more common and increasingly complex, manufacturers require effective tools to monitor the various stages of production. Many of these structures have high aspect ratio, deeply etched features. These are not easily examined with scanning probe techniques, and often SEM examination requires destructive cross sectioning to obtain accurate metrology. |
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Hyphenated Systems 3D Metrology for MEMS Device Development Our Advanced Confocal Technology is the ideal choice for precisely monitoring MEMS structures. Because our technology provides nanometer z sensitivity, we can provide the highly detailed information needed to thoroughly evaluate MEMS characteristics and to process excursions. The combination of our advanced automation capabilities with pattern recognition enables rapid, non-contact evaluation of MEMS structures. Limits process control parameters can be implemented to alert operators on out of specification wafers, allowing the process to be adjusted before further impact on yield occurs. Immediate Advantages: |
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