NanoScale Analysis Software™

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	Software automation and metrology capabilities

Hyphenated Systems proprietary software system gives users the power and control to quickly visualize and measure samples with unprecedented accuracy and Z-resolution. NanoScale™ Analysis Software offers a full complement of 3 dimensional measurement and analysis tools coupled with outstanding 3 dimensional display features for evaluating, sharing and displaying critical sample data.

In addition to its full suite of metrology and 3D imaging tools, our robust software packages accommodate a wide variety of research, development and industrial needs. From economical manual operation to high throughput, fully automated sample positioning and data acquisition, our software packages are suited to a wide range customer and application specific needs.

3D Metrology Tools:

Nanometer resolution step height measurements

Surface profile measurements with multiple line tool options

High angle (45° and higher with certain samples) slope measurements

Area averaged comparison and leveling tools

NIST based line roughness measurements

Versatile operator controlled surface algorithm system that can selectively isolate surfaces beneath transparent media like glass cover slips or photoresist layers

3D Imaging Features

High quality 3 dimensional imaging

Point and click sample rotation and zoom abilities

Data isolation tools for increased flexibility in feature evaluation and display

Variable color palate and color distribution scales

Z-magnification options for image ratio optimization

Advanced Automation Capabilities

Precise X/Y positioning using joystick, click and drag, or coordinate assignment

Full complement of recipe based sample positioning and data acquisition system

Automatic pattern recognition and tool positioning

Automatic data analysis and batch processing