NanoScale Optical Profilers
NanoScale HS OP Systems are designed for fast and non-invasive
inspection and measurement of the 3-dimensional geometry of
ICs, MEMS, micro-fluidic and similar micro- and nano-engineered or
precision-machined structures. The HS OP Systems are especially
suited for measurements of high curvature, steep slope, rough surfaces
and for measurements beneath glass windows or engineered semitransparent films.
Millimeters to Nanometers
NanoScale Profilers combine the latest in confocal, sensor, and analysis technologies to enable
3-dimensional surface imaging with unprecedented resolution and range. All HS systems are designed
for fast, accurate, non-invasive inspection and measurement on any micro or nano-engineered structures.
NanoScale profilers are uniquely suited for obtaining high aspect ratio x y z data on steep
slopes, rough surfaces, and high curvature samples. NanoScale profilers are the most versatile 3D tools on
the market.
Flexible Technology Platforms
Hyphenated-Systems profilers use a familiar white light
microscope platform allowing immediate access to the powerful world of 3- dimensional measurement.
Other members of the NanoScale family are designed to extend this capability with long working
distance or large depth of focus optics, scanning probe technologies, and automation. From manual bench top units to
fully automated production floor systems, Hyphenated-Systems provides fast accurate flexible metrology solutions.
NanoScale Analysis Software
Developed in close collaboration with research and engineering groups, NanoScale Analysis Software
is at the heart of all HS systems. The NAS allows for rapid data acquisition and data sharing, and
provides application, task, and control automation from an intuitive graphical user interface. All
of our tools are scaleable and programmable allowing for optimized metrology even on samples with
angles of greater than 75 degrees.
